Dielectric ceramic components were fabricated by ultraviolet
laser lithography. 2D cross sections were created through dewaxing
and sintering by UV laser drawing on spread resin paste
including ceramic nanoparticles, and 3D composite models
were sterically printed by layer laminations. As the row material
of the lithography, ceramic nanoparticles from 500 nm in average
diameters were dispersed in to liquid resins from 50 % in
volume fraction. The resin paste was spread on a glass substrate
at 50 μm in layer thickness by a mechanically moved knife edge.
An ultraviolet laser beam of 355 nm in wavelength was adjusted
at 10 μm in spot diameter and scanned on the pasted resin
surface. Irradiation power was changed from 600 to 700 mW
for enough solidification depth for 2D layer bonding. Scanning
speed was changed from 50 to 100 mm/s to create fine
lattice structures as shown in Figs. 1 (a), (b) and (c). The half
wavelength of the incident ultraviolet ray should be comparable
with the nanoparticles gaps in the resin paste, therefore
the dewaxing and sintering will be realized through the electromagnetic
waves resonations and localizations as shown in Fig.
1 (c). Through the layer lamination, the 3D titania structures
with 97% in volume fraction were successfully fabricated. The
titania crystal structure was analyzed as dual phase of anatase
and rutile. After the reheating treatment at 1350 °C for 2 hs,
titania components with rutile phase was obtained.
