In the present investigation, low resistive transparent Nano-crystalline cadmium oxide chemical spray pyrolysis technique deposited thin films. The effect of deposition temperature on structural, electrical, and optical properties is studied. The X-ray diffraction patterns revealed that, the CdO films are Nano-crystalline in nature having cubic structure and highly oriented along (111) plane. Scanning electron micrograph images of films showed smooth and dense spherical grains of CdO deposited onto entire glass substrate. The XRD and SEM results showed that the film grown on 3500C exhibits better crystallinity with well-defined grains. The optical band gap energy of CdO varied between 2.46 to 2.71 eV depending on deposition temperature. The resistivity measurement showed that films are semiconducting in nature with very low resistivity of the order of 10-4 to 10-5 ohm-cm. The estimated activation energy was in the range of 0.07 to 0.03 eV.
