The nanoscale bismuth oxide thin films prepared by thermal oxidation (in air) of vacuum evaporated vapor chopped and nonchopped bismuth metal thin films on crystalline alumina and amorphous glass substrates. The effect of substrate nature on the structural, surface morphological, contact angle, electrical resistivity and adhesion properties of Bi2O3 thin films were studied. It is found that the substrate effect was prominently manifested in the surface morphology. Effect of oxidation temperature on thin films properties was also investigated. The surface roughness of deposited Bi2O3 thin films were found to increase on glass while it reduced on alumina with increase in oxidation temperatures. All the films showed hydrophilic nature. Contact angle was found to decrease with increase in surface roughness in all cases. Adhesion, crystallinity and grain size of bismuth oxide films on alumina substrate was found to be higher than in the case of Bi2O3 thin films deposited on glass. Vapor chopped thin films showed higher adhesion, smaller grain size, higher contact angle, lower resistivity and smooth surface morphology.
