Over the last decade Micro-Electro-Mechanical Systems (MEMS) have evoked great interest in the scientific and engineering communities. They are formed by integration of electronic and mechanical components at micron level. They have several substantive advantages: orders of magnitude smaller size, better performance than other solutions, possibilities for batch fabrication and cost-effective integration with electronics and potentially large reduction in power consumption, etc. This paper will give an introduction to these exciting developments of MEMS, the fabrication technology used and applications in various fields.
