European Journal of Applied Engineering and Scientific Research
Abstract
Author(s): Srinivasa Rao Karumuri
This example describes the modeling of one of the legs of a silicon microrobot. The microrobot uses a technique
based on polyimide V-groove joints to get each of the legs to move. The polyimide has a relatively high coefficient of thermal expansion �Ž�±, which causes the leg to bend slightly when the polyimide is heated. Putting several V-grooves on each leg provides sufficient deflection.
