Transparent and conductive ZnO: Al Thin Films prepared by Sol -Gel Process

By M. A. Chougule, S. L. Patil, S. G. Pawar, V. B. Patil

Abstract

Transparent and conductive Al doped ZnO thin films were synthesized at room temperature by sol gel technique. The sols were prepared using zinc acetate dihydrate and methanol as the precursors with aluminum nitrate as the dopant. The films were characterized by X-ray diffraction and UV spectrometer. The films showed a hexagonal wrutzite structure and high preferential C-axis orientation. A minimum resistivity of 5.8 x 10-4 cm was obtained for the film doped with 1.5 mol% Al as annealed at 5000C for 1 h. Optical transmissions reveal a good transmittance within the visible wavelength spectrum region for all of the films.

Key Words : ZnO, aluminum doping, sol gel, X- ray diffraction, AFM

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